Inertial MEMS Foundry Services

For capacitive MEMS acceleration, vibration and angular rate sensors

At Tronics we have pioneered the production of capacitive inertial MEMS devices made on thick SOI. We bring you more than 20 years’ experience and track record in producing high performance accelerometers, gyroscopes and vibrations sensors for demanding customers and applications.

We provide you with an easy access to Magelan, our core and standard inertial MEMS foundry technology, as well as to proven foundry process solutions for the production and packaging of your most innovative single-axis to multi-axis inertial and vibration sensors design.

Magelan: standard foundry platform

Standard inertial MEMS foundry process for capacitive devices on thick SOI with hermetic/vacuum WLP

Custom inertial MEMS foundry solutions

For the fabrication, assembly and packaging of high performance inertial MEMS devices